EE2033 MICRO ELECTRO MECHANICAL SYSTEMS SYLLABUS

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AIM

The aim of this course is to educate the student to understand the fundamentals of Micro

Electro Mechanical Systems (MEMS)

OBJECTIVES

At the end of this course the student will be able to

 integrate the knowledge of semiconductors and solid mechanics to fabricate

MEMS devices.

 understand the rudiments of Microfabrication techniques.

 identify and understand the various sensors and actutators

 different materials used for MEMS

 applications of MEMS to disciplines beyond Electrical and Mechanical

engineering.

UNIT I INTRODUCTION

Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and

Actuators – Introduction to Microfabrication - Silicon based MEMS processes – New

Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor

devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

UNIT II SENSORS AND ACTUATORS-I

Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger

capacitor – Comb drive devices – Thermal Sensing and Actuation – Thermal expansion

– Thermal couples – Thermal resistors – Applications – Magnetic Actuators –

Micromagnetic components – Case studies of MEMS in magnetic actuators.

UNIT III SENSORS AND ACTUATORS-II

Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical

elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric

sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to

Inertia , Acoustic, Tactile and Flow sensors.

UNIT IV MICROMACHINING

Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma

Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase

Etchants – Case studies - Basic surface micromachining processes – Structural and

Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods

– Assembly of 3D MEMS – Foundry process.

UNIT V POLYMER AND OPTICAL MEMS

Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA –

Parylene – Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile

sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.

TEXT BOOKS.

1. Chang Liu, ‘Foundations of MEMS’, Pearson Education Inc., 2006.

2.. James J.Allen, micro electro mechanical system design, CRC Press published in

2005

REFERENCES

1. Nadim Maluf, “ An introduction to Micro electro mechanical system design”, Artech

House, 2000.

2. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000

3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill,

New Delhi, 2002.

4. Julian w. Gardner, Vijay k. varadan, Osama O.Awadelkarim,micro sensors mems and

smart devices, John Wiley & son LTD,2002